@Article{MarianoUeda:2020:GlCaFi,
               author = "Mariano, Samantha de F{\'a}tima Magalh{\~a}es and Ueda, 
                         M{\'a}rio",
          affiliation = "{Instituto Nacional de Pesquisas Espaciais (INPE)} and {Instituto 
                         Nacional de Pesquisas Espaciais (INPE)}",
                title = "Glass-like carbon films grown by pulsed hollow cathode via 
                         plasmaimmersion ion implantation and deposition",
              journal = "Thin Solid Films",
                 year = "2020",
               volume = "693",
                pages = "e137703",
                month = "Jan.",
             keywords = "Hollow cathode discharge, Plasma immersion ion implantation and 
                         deposition, Diamond-like carbon, Glass-like carbon, Nanostructured 
                         carbon films, Thin films.",
             abstract = "Plasma Immersion Ion Implantation and Deposition (PIII\&D) 
                         systems based on pulsed metal tubes are a very promising technique 
                         to deposit diamond-like carbon and correlated thin films. A hollow 
                         cathode plasma can be appropriately used to locally deposit 
                         glass-like carbon films on small substrates by means of PIII\&D. 
                         The morphology, microstructure, roughness as well as the 
                         investigation of the chemical structure of the as-deposited 
                         graphitic films outside the pulsed tube are reported. By the 
                         described PIII\&D setup, the power of the discharge plasma can be 
                         properly adjusted to produce a range of disordered carbon films. 
                         But their structures are not so extensively changed since high 
                         temperatures (around 900 degrees C) are inherent in these 
                         conditions. Furthermore, there is a minimum power required to 
                         sustain the hollow cathode discharge when small tubes are used. 
                         Moreover, an additional effect caused by the intense bombardment 
                         of secondary electrons outside the tube can account for the 
                         growing of more ordered and rougher graphitic carbon coatings. We 
                         have then found that those nanostructured glass-like carbon films 
                         are strongly dependent on the power of the produced plasma that 
                         impinges on the substrate surface increasing its temperature.",
                  doi = "10.1016/j.tsf.2019.137703",
                  url = "http://dx.doi.org/10.1016/j.tsf.2019.137703",
                 issn = "0040-6090",
             language = "en",
           targetfile = "mariano_glass.pdf",
        urlaccessdate = "13 maio 2024"
}